Discussion
1. Among possible phenomena, diffusion, evaporation and surface tension were considered to simulate the surface change in thin film.
- the nucleation of grains was not considered in our simulation.
2. Current simulation was applied at relatively low annealing temperatures.
- the diffusion coefficient exponentially increases with higher temperature.
- the surface morphology changed rapidly at high temperature.
3. With grain boundary, heat treatment induced increase in surface roughness.
Without grain boundary, heat treatment induced decrease in surface roughness.
These two effects might determine the actual surface roughness.