Conclusions
The effect of annealing temperature (300 K – 450 K) on surface morphology evolution was simulated. Diffusion, interface migration, and surface tension were considered in this model. We studied two models. In the first model, grain boundary was applied to simulate the thermal grooving effect. This model showed faster evolution of thermal groove at higher temperature. In the second model, grain boundary was removed to see the surface healing effect. This model showed faster surface healing at higher temperature.