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Introduction

Micro- or nano- scale structure can be used as a variety applications depending on how shape changes or what the final structure is. Examples is silicon nanowire (SiNW) is very promising materials for Li-ion battery anode. We can see volume expansion during charge–discharge cycling, this nanowire accommodates large volume changes because of its flexibility. It is also applicable to use hollow or void structure. If we put sulfur into this void structure, it can be used as a Li-sulfur battery because this hollow structure has a lot of flexibility. Therefore, acquiring of void structure is very important to make a battery application.

<Various hollow structure for Li-battery applications>

Uniform and even silicon thin film is also very useful for highly improved Li-ion battery performance. Quantum Dots (QD) or micro- and nano hierarchical rod is very helpful for making display or superhydrophobic surface, respectively. All these structures can be obtained from experimental procedure. But we can also modeling simulation results can be achieved by Finite Element Method. And thereby this accurate prediction can avoid waste of unnecessary experimental cost. Therefore, by using surface migration mobility factor, and surface diffusion factor is required for acquisition of precise structure evolution. We can estimate a structure evolution according to time change via Finite Element Method (FEM).