Finite Element Method Simulation of Nano-Dots Formation under Ion Beam Modification

Efrain Hernandez-Rivera

Kun-Dar Li

Takashi Kozai

 

Different structures created from identical thin films by applying different ion beam irradiation conditions.

Abstract

We used FEM to model the formation of nanodots due to ion beam irradiation. The models accounted for surface stress energy and irradiation induced sputtering to achieve the results. We observed that surface energy drives the surface to a flat profile and sputtering reduces the thickness of the thin films. Under irradiation, the thin film evolves into nanodots, but after prolonged irradiation time the thin film is completely sputtered out of the substrate surface.

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