The goal for this project is to design a working simulation for thin film growth in a vapor phase on a substrate. Here we have employed the finite element method to simulate thin film growth. This simulation assumes thin film growth on a substrate that is seeded with small particles that grow in the vapor environment and merge to become the thin film. From this model we have successfully modeled thin film growth and are able to observe how various parameters can affect growth.
This website contains the details of the project and the simulation. The website is organized as follows:
Acknowledgments:
Yang, B. S. Z. S. W. (1996). "A Finite Element Method for Simulating Interface Motion- I. Migration of Phase and Grain Boundaries." Acta Materialia 45(5): 1907-1915.
Professor Wei Lu lecture notes Week 1-6.
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