Vineet Maheshwary

Vineet Maheshwary



MEMS Heat Engine for Power Generation Using External Heat Source

One of my most exciting projects was in the Micro Electro-Mechanical Systems (MEMS) design course.
This course provides fundamental knowledge on MEMS technology and microsystems.


The covered topics in this course include: Picture of FEA model coming soon
  • surface micromachined lateral spring design
  • piezoresistive & capacitive sensors design
  • micromechanical resonators design
  • electrostatic & thermal actuators design
  • fluidic microdevices design
  • surface/bulk micromachining
  • fundamentals of mechanical measurement and electronics
Final project

This course includes a term project carried out by a group of 3 students taking the course. In the project, we are required to perform quantitative design, modeling, and analysis of a MEMS device of our interest.

Required Steps:
  1. Pick up a particular MEMS/nano device
  2. Define design objectives (force, displacement, sensitivity, size, etc…) for the selected MEMS/nano device in connection to a particular application.
  3. Propose a new design feature for the selected MEMS.
  4. Develop a model that allows performance of parametric design analysis of the MEMS design.
  5. Perform quantitative analysis of the performance of the selected MEMS.
  6. Discuss the impact of the design project.

Given my interest in physics and thermo-mechanical design and passion to conceptualize, explore and design products, especially those that increase sustainable utilization of resources to enable more people to lead a good quality of life, I designed a MEMS device to utilize waste heat and solar energy to generate electricity.

View Proposal

visits to this page since June 1, 2006. Contact me at vineetm@umich.edu Click for Michigan Forecast