Honeycomb
Pump
Technology Evolution
April 2009 - present
H o m e · A b o u t H C P · I n P r e s s
Initially started in April 2009 (in search for a microfabrication technology to realize Michigan's Scalable Peristaltic Gas Micropump, requested by the DARPA CSVMP Program), the current Honeycomb Pump (HCP) Fabrication Technology is a descendant of several (16 so far!) different device generations - designed and fabricated by Ali Besharatian at the University of Michigan and Lurie Nanofabrication Facility (LNF). A number of fabrication runs failed during process development; however, the overall effort has created a robust, high yield (over 90%), accurate and high throughput process, applicable to a broad range of MEMS devices and microsystem applications. Moreover, the research has resulted in several scholarly publications, received major media and news coverage, and developed a number of secondary technologies (to support the fabrication of HCP). Upon reporting the first working gas micropump in 2012, a new journey in device testing, characterization and optimization has been started - the technology evolution still goes on...
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Copyright © 2013 Ali Besharatian
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If I find 10'000 ways something won't work, I haven't failed.
I am not discouraged, because every wrong attempt discarded is another step forward.
Thomas A. Edison